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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH01175756(A)
申请公布日期
1989.07.12
申请号
JP19870334048
申请日期
1987.12.29
申请人
FUJITSU LTD
发明人
EMA TAIJI
分类号
H01L23/522;H01L21/768;H01L21/822;H01L21/8242;H01L27/04;H01L27/10;H01L27/108
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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