| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor having a structure for facilitating formation of electrode and detecting acceleration in many directions on a same plane. SOLUTION: The acceleration sensor comprises a movable electrode 1 having circular upper and lower surfaces secured to a lower glass substrate 5 by a support 2, and upper and lower electrodes 6, 5 arranged oppositely on the upper and lower surfaces of the movable electrode 1 wherein the movable electrode 1 displaces in the direction perpendicular to a lower glass substrate 3 upon generation of an acceleration in the direction parallel with the surface of the lower glass substrate 3 and touches the upper and lower electrodes 6, 5 thus detecting the acceleration. |
