| 摘要 |
PROBLEM TO BE SOLVED: To improve the optical performance by setting the variations of the projection magnification, the symmetric deformation aberration and the optical characteristic to specified values, and setting all the angles that two of three vectors mutually make to specified ranges, when a first, second and third parameters of a projection optical system are changed. SOLUTION: The image forming condition of a pattern image of a reticle 4 is monitored from picture data from image sensing elements to optically detect the variationsΔβ1-Δβ3 of the max. image height due to the variation magnification change of the max. image height with the projection magnification variation, the variationsΔSD1-ΔSD3 of the symmetric deformation aberration, and the variationsΔA1-ΔA3 of the optical characteristics when a first, second and third parameters of a projection optical system 5 are changed. All the angles in two of detected three vectors (Δβ1,ΔSD1,ΔA1), (Δβ2,ΔSD2,ΔA2), (Δβ3,ΔSD3,ΔA3) are set to 30-150 deg.. |
