| 摘要 |
PURPOSE: An interlocking apparatus and method for controlling the same are provided to be capable of preventing damage of a wafer due to incomplete opening of an exit load lock outdoor, by interlocking the exit outdoor valve. CONSTITUTION: An interlocking apparatus includes first and second stages, an automatic loading arm(10) and an exit locking arm. A sensing means senses the location of the automatic loading arm by illuminating light to the automatic loading arm and receiving the returned light therefrom. A comparison means compares the sensed light in the sensing means to determine whether an exit load lock outdoor(50) is open or not. As a result of the determination by the comparison means, a controller drives an open/close valve of the exit load lock outdoor to open the exit load lock outdoor when the automatic loading arm is at a normal location, and controls the operating state of the open/close valve of the exit load lock outdoor when the automatic loading arm is not at a normal location.
|
