| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device capable of preventing the up-sizing, and to provide a transfer method.SOLUTION: A transfer device 10 includes conveyance means 20 for taking out a plate-like member WF from housing means CT capable of stacking the plate-like members WF in a direction crossing the surface of the plate-like member WF, and detection means 30 capable of detecting the position of the plate-like member WF taken out by the conveyance means 20. The detection means 30 has surface direction detection means 33 capable of detecting a position in the surface direction of the plate-like member WF, by moving in the stacking direction and approaching the plate-like member WF to be taken out from the housing means CT.SELECTED DRAWING: Figure 1 |
