Method of making a cantilever stylus for use in an atomic force microscope.

摘要

A cantilever stylus (15) suited for use in an atomic force microscope is made in the following processes: forming a first film (12) on a substrate (11); forming a second film (13) of metallic material on an external surface of the first film (12); forming a photoresist film (14) on an external surface of the second film (13) by making use of a photolithography technique; performing etching with respect to the second film (13) with only a portion thereof covered with the photoresist film (14) left on the first film (12); and further performing etching with respect to the first film (12) with the second film (13) being used as a resist film so that the first film (12) may be configured into a cantilever stylus (15).