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发明名称
ZENTRIFUGAL-REINIGUNGSVORRICHTUNG FÜR WAFERBEHÄLTER
摘要
申请公布号
DE69313277(T2)
申请公布日期
1998.03.26
申请号
DE1993613277T
申请日期
1993.06.03
申请人
SEMITOOL, INC., KALISPELL, MONT., US
发明人
THOMPSON, RAYMON, F., LAKESIDE, MT 59922, US;OWCZARZ, ALEKSANDER, KALISPELL, MT 59901, US
分类号
B08B3/02;H01L21/00;H01L21/304;(IPC1-7):H01L21/00;B08B3/04
主分类号
B08B3/02
代理机构
代理人
主权项
地址
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