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发明名称
Vorrichtung zur Erzeugung eines Strahls von Atomen oder Radikalen
摘要
申请公布号
DE19806692(A1)
申请公布日期
1999.08.26
申请号
DE19981006692
申请日期
1998.02.18
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
TSCHERSICH, KARL G.;FLEISCHHAUER, JOHANNES
分类号
H05H3/02;(IPC1-7):H05H3/02;B01J19/00
主分类号
H05H3/02
代理机构
代理人
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地址
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