SUBSTRATE FOR PROBE CARD TO IMPROVE STABILITY OF ELECTRICAL CONTACT AND OBTAIN HIGH RELIABILITY

摘要

PURPOSE: A substrate for a probe card is provided to improve stability of an electrical contact and obtain high reliability by controlling a contact defect between a main substrate and a sub substrate. CONSTITUTION: A main substrate(1) comes in contact with a measurement unit for inspecting a semiconductor device. A contact part in contact with the semiconductor device is attached to a sub substrate(2). A conductive element electrically conducts the main substrate and the sub substrate. The main is fixedly attached to the sub substrate. An electrode on the surface of the main substrate confronting the sub substrate is electrically conducted to an electrode of the surface of the sub substrate confronting the main substrate.