发明名称 SPACE TRANSFORMER, METHOD OF FABRICATING THE SAME AND PROBE CARD INCLUDING SPACE TRANSFORMER
摘要 Provided is a space transformer. The space transformer includes ceramic layers stacked by interposing a fine line pattern layer between them. Each of the ceramic layers includes a ceramic substrate with reference vias penetrating them, and an alignment key which is arranged on the edge of the ceramic substrate adjacent to the reference vias of the outermost ceramic layer of the upper surface direction of the ceramic substrate among the ceramic layers, penetrates the outermost ceramic layer, and is extended to part of the next outermost ceramic layer. So, position accuracy with a circuit board can be improved.
申请公布号 KR20160095392(A) 申请公布日期 2016.08.11
申请号 KR20150016609 申请日期 2015.02.03
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 MA, WON CHUL
分类号 G01R1/073 主分类号 G01R1/073
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