| 主权项 |
1. A device, comprising:
a substrate, the substrate including a device layer; a magnetic sensor formed on the device layer, the magnetic sensor including at least a first permanent magnet and a plurality of sensing elements, wherein, the first permanent magnet deposited on a movable actuator, the first permanent magnet deposited with at least one alternating ferromagnetic (FM) layer and antiferromagnetic (AFM) layer, with a first barrier layer deposited between the FM layer and the AFM layer; and the first permanent magnet is magnetized in a first direction at a temperature higher than a blocking temperature of the AFM layer of the first permanent magnet; and wherein, the plurality of sensing elements including at least one electrode configured to move relative to the sensing elements, based upon a movement of the first permanent magnet deposited on the movable actuator; a plurality of device pads coupled to the magnetic sensor; and an integrated circuit substrate with a plurality of IC pads, wherein the plurality of device pads are selectively eutectic bonded to the plurality of IC pads at a bonding temperature greater than the blocking temperature of the first permanent magnet. |
