发明名称 EXCHANGE METHOD FOR CUTTING BLADE
摘要 PROBLEM TO BE SOLVED: To provide an exchange method for a cutting blade by which an accuracy of management for timing for flatness correction of a holding surface of a flange can be improved.SOLUTION: An exchange method for a cutting blade comprises: a pressure sheet holding process in which a pressure sheet (20), which detects a pressure instead of a cutting blade (55) at a same force when the cutting blade is held, is held by flanges (59, 66); a correction determination process in which after the pressure sheet holding process, necessity for flatness correction of holding surfaces (67, 68) is determined according to a pressure state which is detected by the pressure sheet; a flatness correction process in which a flatness of the holding surface of at least one flange is corrected according to determination in the correction determination process; and a cutting blade holding process in which the cutting blade is held by two flanges according to determination in the correction determination process via the flatness correction process.SELECTED DRAWING: Figure 2
申请公布号 JP2016179520(A) 申请公布日期 2016.10.13
申请号 JP20150060248 申请日期 2015.03.24
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHIDA KEIGO
分类号 B24B45/00;H01L21/301 主分类号 B24B45/00
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