发明名称 CONTACTOR HOLDING MECHANISM AND AUTOMATIC CHANGE MECHANISM FOR CONTACTOR
摘要 A contactor holding mechanism and an automatic contactor change mechanism having the contactor holding mechanism; the contactor holding mechanism comprising a frame body (11) fixed to a performance board (P), a plurality of latch mechanisms (13) for holding a contactor inside the frame body, and a fixedly sucking mechanism (14) for fixing the contactor held by the latch mechanisms inside the frame body using a vacuum sucking force; the automatic contactor change mechanism comprising a holding mechanism (10) detachably holding the contactor and a transfer mechanism (16) transferring the contactor (12) between it and the holding mechanism, the transfer mechanism comprising a sucking and holding part (17) sucking and holding the contactor (12), a swingable and liftable arm (18) having the sucking and holding part at the tip of the arm, and an arm drive part (19) to swing and lift the arm (18).
申请公布号 WO0045433(A1) 申请公布日期 2000.08.03
申请号 WO2000JP00442 申请日期 2000.01.28
申请人 TOKYO ELECTRON LIMITED;IINO, SHINJI;HAGIHARA, JUNICHI;TAKEKOSHI, KIYOSHI 发明人 IINO, SHINJI;HAGIHARA, JUNICHI;TAKEKOSHI, KIYOSHI
分类号 G01R1/06;G01R31/28;H01L21/66;H01L21/683;H01L21/687;(IPC1-7):H01L21/66 主分类号 G01R1/06
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