发明名称 |
CONTACTOR HOLDING MECHANISM AND AUTOMATIC CHANGE MECHANISM FOR CONTACTOR |
摘要 |
A contactor holding mechanism and an automatic contactor change mechanism having the contactor holding mechanism; the contactor holding mechanism comprising a frame body (11) fixed to a performance board (P), a plurality of latch mechanisms (13) for holding a contactor inside the frame body, and a fixedly sucking mechanism (14) for fixing the contactor held by the latch mechanisms inside the frame body using a vacuum sucking force; the automatic contactor change mechanism comprising a holding mechanism (10) detachably holding the contactor and a transfer mechanism (16) transferring the contactor (12) between it and the holding mechanism, the transfer mechanism comprising a sucking and holding part (17) sucking and holding the contactor (12), a swingable and liftable arm (18) having the sucking and holding part at the tip of the arm, and an arm drive part (19) to swing and lift the arm (18).
|
申请公布号 |
WO0045433(A1) |
申请公布日期 |
2000.08.03 |
申请号 |
WO2000JP00442 |
申请日期 |
2000.01.28 |
申请人 |
TOKYO ELECTRON LIMITED;IINO, SHINJI;HAGIHARA, JUNICHI;TAKEKOSHI, KIYOSHI |
发明人 |
IINO, SHINJI;HAGIHARA, JUNICHI;TAKEKOSHI, KIYOSHI |
分类号 |
G01R1/06;G01R31/28;H01L21/66;H01L21/683;H01L21/687;(IPC1-7):H01L21/66 |
主分类号 |
G01R1/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|