Waferstart processes and systems for integrated circuit fabrication

摘要

A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is entered from the machine-readable medium associated with the container into the computer. The order information and the wafer data are compared within the computer to create a verified data set in the computer upon the computer determining that the supplied wafers in the container correspond to the requested wafers in the order information. The verified data set is stored in a storage medium within the computer. The supplied wafers are transferred from the container to a front opening unified pod after creating the verified data set.

主权项

1. A waferstart system for integrated circuit fabrication, said waferstart system comprising:
a computer including a data input interface and a storage medium, the computer configured to receive order information from requested wafers through the data input interface of the computer and to receive wafer data pertaining to supplied wafers; a stocker having a plurality of slots adapted to receive a container including supplied wafers with the container having a machine-readable medium associated therewith and encoded with the wafer data pertaining to the supplied wafers in the container, wherein numerous containers are provided in the shipment of requested wafers, wherein the order information comprises information regarding the entire shipment, and wherein the order information is included with the shipment of the wafers, a sensing device adapted to read the wafer data from the machine-readable medium associated with the container, the sensing device in informational communication with the computer for transferring the wafer data from the sensing device to the computer; and a container transporter adapted to move the container into and out of the plurality of slots in the stocker; wherein the computer is configured to compare the order information from the requested wafers and the wafer data from the supplied wafers within the computer to create a verified data set in the computer, wherein the storage medium is adapted to store the verified data set therein, and wherein the computer is adapted to initiate transfer of the supplied wafers from the container into and out of the stocker to a front opening unified pod using the container transporter based upon creation of and/or information contained in the verified data set.