| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck device capable of easily replacing a foreign substance circulation preventive member with one corresponding to a purpose, and suppressing capital investment.SOLUTION: A chuck device 10 is equipped with a chuck body 18 formed with an arrangement hole 16 on which a plurality of fingers 14 opened/closed by a drive mechanism 12 is arranged; and a plurality of cover portions 20 formed with finger insertion holes 106. Each cover portion 20 is detachably provided on the chuck body 18, and can be replaced with another cover portion 20 equipped with a foreign substance circulation preventive member 112 corresponding to a purpose.SELECTED DRAWING: Figure 3 |
