摘要 |
PROBLEM TO BE SOLVED: To make an optical semiconductor device large in band width. SOLUTION: An optical semiconductor device is composed of a substrate 1, an optical waveguide 3 placed on the substrate 1, a grounding electrode layer 42 formed on the side of the optical waveguide 3 where light is incident, an optical semiconductor element 2 mounted on the grounding electrode layer 52 making its active layer 2a face downward, and a dielectric layer 5 where a linear conductive layer 41 is formed on its upside for the input of microwave signals. At this point, the linear conductive layer 41 is connected to the back electrode 2b of the active layer 2a. |