Composite substrates for acoustic wave elements, and acoustic wave elements

摘要

A composite substrate for an acoustic wave element includes a support substrate 1 and a propagation substrate 3 for propagating an acoustic wave. The propagation substrate is bonded to the support substrate 1 and composed of a piezoelectric single crystal. The propagation substrate 3 includes a surface lattice distortion layer 11 in which crystal lattices of the piezoelectric single crystal are distorted.

主权项

1. A composite substrate for an acoustic wave element: said acoustic wave element comprising a support substrate and a propagation substrate for propagating an acoustic wave, said propagation substrate being bonded to said support substrate and comprising a piezoelectric single crystal;
wherein said propagation substrate comprises a bonding face to be bonded to said support substrate and a surface on the opposite side of said bonding face; wherein said propagation substrate comprises a surface lattice distortion layer on the side of said surface on the opposite side of said bonding face and in which crystal lattices of said piezoelectric single crystal are distorted; and wherein said surface lattice distortion layer has a thickness of 15 nm or smaller.