CHARGED PARTICLE BEAM APPARATUS, SPECIMEN OBSERVATION SYSTEM AND OPERATION PROGRAM

摘要

For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.

主权项

1. A charged particle beam apparatus comprising:
a processor configured to control the charged particle beam apparatus to acquire information of a specimen by irradiating a primary electron beam on the specimen, the processor causing an image display device to display a schematic diagram showing a current irradiation status of the primary electron beam.