| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-density integrated head having a plurality of inkjet type recording heads integrated, which is a piezoelectric MEMS type inkjet type recording head as compact as possible, and an inkjet recording device.SOLUTION: An inkjet type recording head has an integrated head. The integrated head is formed of a plurality of arranged cells of an inkjet injection part. The cells of the ink injection part have a vibration plate, a piezoelectric drive element, a nozzle, and a pressure generation chamber. The vibration plate is formed on a silicon substrate. The piezoelectric drive element is constituted of a lower electrode, a piezoelectric film, and an upper electrode on the vibration plate. The nozzle is formed in the vibration plate. The pressure generation chamber is formed adjacently to the vibration plate. In the integrated head, lead-out wiring for individually driving connected to either one of the upper electrode and the lower electrode which drive the cells is formed across the vibration plates above the pressure generation chambers of the other cells.SELECTED DRAWING: Figure 3 |
