发明名称 Wavelength selective heat radiation material selectively radiating heat radiation light corresponding to infrared ray transmission wavelength region of resin member and method for manufacturing the same
摘要 An object is to provide a method for manufacturing a wavelength selective heat radiation material in which a surface roughness of an upper portion of a cavity wall defining each microcavity is suppressed or in which microcavities each having an aspect ratio larger than 3.0 are formed. For the wavelength selective heat radiation material, a base material having a mask having predetermined openings tightly adhered to a surface thereof, or a base material in which depressions are previously formed on one surface thereof by pressing a die having projections arrayed so as to correspond to positions of microcavities thereagainst, is subjected to anisotropic etching, thereby providing a wavelength selective heat radiation material in which the surface roughness of the upper portion of the cavity wall defining each of the microcavities is suppressed or a wavelength selective heat radiation material having microcavities whose each aspect ratio is larger than 3.0.
申请公布号 US9520335(B2) 申请公布日期 2016.12.13
申请号 US201515029441 申请日期 2015.04.02
申请人 TOKYO METROPOLITAN UNIVERSITY;OKITSUMO INCORPORATED 发明人 Masuda Hideki;Kondo Toshiaki;Toyonaga Takashi;Kimura Naoshi;Yoshioka Fumitaka
分类号 H01L23/34;H01L23/367;C25F3/04;C25F3/14;C25F3/20;C23F1/20;H01L23/36;H01L23/373;H05K7/20;C23C14/00;C23C14/04;C23C14/20;C23C14/34;C23C14/58;C25F3/22 主分类号 H01L23/34
代理机构 Milen, White, Zelano, Branigan, P.C. 代理人 Milen, White, Zelano, Branigan, P.C.
主权项 1. A wavelength selective heat radiation material for selectively radiating heat radiation light corresponding to an infrared ray transmission wavelength region of a resin member, said wavelength selective heat radiation material comprising: a base material having a heat radiation surface, said heat radiation surface having a multitude of microcavities formed therein, the microcavities having rectangular openings being periodically repeated and being two-dimensionally arrayed in a grating-like manner, and the microcavities each having an opening ratio a/Λ, wherein a is opening size in μm and Λ is opening period, in a range of 0.5 to 0.9, each having an aspect ratio d/a, wherein d is opening depth in μm and a is opening size in μm, of 3.3 or more, and each having 1 μm or less of a surface roughness Rz of an upper portion of a cavity wall defining each of the microcavities, wherein said wavelength selective heat radiation material selectively radiates heat radiation light corresponding to an infrared ray transmission wavelength region of a resin member.
地址 Tokyo JP