发明名称 |
Wavelength selective heat radiation material selectively radiating heat radiation light corresponding to infrared ray transmission wavelength region of resin member and method for manufacturing the same |
摘要 |
An object is to provide a method for manufacturing a wavelength selective heat radiation material in which a surface roughness of an upper portion of a cavity wall defining each microcavity is suppressed or in which microcavities each having an aspect ratio larger than 3.0 are formed. For the wavelength selective heat radiation material, a base material having a mask having predetermined openings tightly adhered to a surface thereof, or a base material in which depressions are previously formed on one surface thereof by pressing a die having projections arrayed so as to correspond to positions of microcavities thereagainst, is subjected to anisotropic etching, thereby providing a wavelength selective heat radiation material in which the surface roughness of the upper portion of the cavity wall defining each of the microcavities is suppressed or a wavelength selective heat radiation material having microcavities whose each aspect ratio is larger than 3.0. |
申请公布号 |
US9520335(B2) |
申请公布日期 |
2016.12.13 |
申请号 |
US201515029441 |
申请日期 |
2015.04.02 |
申请人 |
TOKYO METROPOLITAN UNIVERSITY;OKITSUMO INCORPORATED |
发明人 |
Masuda Hideki;Kondo Toshiaki;Toyonaga Takashi;Kimura Naoshi;Yoshioka Fumitaka |
分类号 |
H01L23/34;H01L23/367;C25F3/04;C25F3/14;C25F3/20;C23F1/20;H01L23/36;H01L23/373;H05K7/20;C23C14/00;C23C14/04;C23C14/20;C23C14/34;C23C14/58;C25F3/22 |
主分类号 |
H01L23/34 |
代理机构 |
Milen, White, Zelano, Branigan, P.C. |
代理人 |
Milen, White, Zelano, Branigan, P.C. |
主权项 |
1. A wavelength selective heat radiation material for selectively radiating heat radiation light corresponding to an infrared ray transmission wavelength region of a resin member, said wavelength selective heat radiation material comprising:
a base material having a heat radiation surface, said heat radiation surface having a multitude of microcavities formed therein, the microcavities having rectangular openings being periodically repeated and being two-dimensionally arrayed in a grating-like manner, and the microcavities each having an opening ratio a/Λ, wherein a is opening size in μm and Λ is opening period, in a range of 0.5 to 0.9, each having an aspect ratio d/a, wherein d is opening depth in μm and a is opening size in μm, of 3.3 or more, and each having 1 μm or less of a surface roughness Rz of an upper portion of a cavity wall defining each of the microcavities, wherein said wavelength selective heat radiation material selectively radiates heat radiation light corresponding to an infrared ray transmission wavelength region of a resin member. |
地址 |
Tokyo JP |