发明名称 Magnetic cell and magnetic memory
摘要 It is possible to provide a magnetic cell having a high developing rate of MR characteristics and a reduced fluctuation without causing element falling-down and a magnetic memory having the same. A magnetic cell includes: a lower electrode; an electrically conductive pillar formed on the lower electrode; a magnetoresistance effect film having at least two ferromagnetic layers formed on the electrically conductive pillar and an intermediate layer provided between the ferromagnetic layers; an upper electrode formed on the magnetoresistance effect film; a support layer formed from at least one metal directly on a side face of the electrically conductive pillar or via an insulating layer; and a current diffusion preventing layer provided between the support layer and the lower electrode, wherein a height of the electrically conductive pillar, a thickness of the current diffusion preventing layer, and a thickness of the support layer satisfy relationships of <maths id="MATH-US-00001" num="00001"> <MATH OVERFLOW="SCROLL"> <MROW> <MI>h</MI> <MO>></MO> <MROW> <MI>t1</MI> <MO>+</MO> <MI>t2</MI> </MROW> <MO>></MO> <MROW> <MFRAC> <MN>30</MN> <MROW> <MN>30</MN> <MO>+</MO> <MI>L</MI> </MROW> </MFRAC> <MO>x</MO> <MI>h</MI> </MROW> </MROW> </MATH> </MATHS> where h represents the height of the electrically conductive pillar, t 1 represents the thickness of the current diffusion preventing layer, t 2 represents the thickness of the support layer, and L (nm) represents a length of a short side of the electrically conductive pillar.
申请公布号 US7042758(B2) 申请公布日期 2006.05.09
申请号 US20040943835 申请日期 2004.09.20
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HANEDA SHIGERU;NAKAMURA SHIHO;OOSAWA YUUICHI
分类号 G11C7/00;H01L27/105;G11C11/15;H01L21/8246;H01L43/08 主分类号 G11C7/00
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