CORROSION-RESISTANT ELECTROSTATIC CHUCK

摘要

PURPOSE: To reduce an electrostatic stacked area exposed to plasma by removing an electrostatic stacked strap area extending beyond a pedestal tip part. CONSTITUTION: An electrostatic chuck is provided for fixing a semiconductor substrate 8 to a prescribed position within a processing chamber. A non-reactive gas is connected (ported) to an area near the end part of the dielectric part of the chuck through a pedestal to protect the end part of the dielectric part from erosion caused by a processing area.