| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer carrier which is capable of stably carrying wafers and minimizing adhesion of particles onto the wafers. SOLUTION: This wafer carrier transports or holds wafers in a horizontal condition with their axes being aligned. The carrier supports the wafers at their edge parts at least four points. In an embodiment, the carrier is of an H-bar type which has a plurality of slots defined by elongated wafer guides 120 provided on sidewalls of the carrier. The carrier holds wafers in such a condition that upward-protruded projections minimize the contact between the carrier and wafers. The number and shape of such projections are set so that the projections not to come into contact with the upper side faces of the guides.</p> |
