MULTI-BEAM MICRO-MACHINING SYSTEM AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a multi-beam micro-machining system and method.

SOLUTION: A system for delivering energy to a substrate 14 includes a dynamically directable source 20 of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements 54 in a plurality of beam steering elements 54 are operative to receive the beams and direct them to selectable locations on the substrate.

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