| 摘要 |
A capacitance type acceleration sensor in which detection error can be reduced by suppressing the component of other axial acceleration, is provided. There are bonded onto one major surface of a glass substrate (11) a substantially rectangular parallelepiped weight (15) becoming a movable electrode forming a measurement object capacitance between the weight (15) and a fixed electrode (12), and a second substrate, i.e. a silicon substrate (13), having a beam (14) for supporting that weight (15). The beam (14) consists of a long portion (14a) extending along the periphery of the weight (15) at a predetermined interval therefrom in the plan view, and of a coupling portion (14b) for coupling the long portion (14a) and the weight (15). A space (17) is provided between the weight (15) and the long portion (14a). The fixed electrode (12) provided on the glass substrate (11) extends to the space (17) between the weight (15) and the long portion (14a). |
