| 摘要 |
PURPOSE:To enable a title item to be formed in an integral three-axis one-output sensor. CONSTITUTION:A title item is provided with a substrate portion 1, a cavity portion 5 which is formed through this substrate 1, a movable mass portion 2 which is supported so that it can move freely within this cavity portion 5, and a spring portion 4 where one edge side is connected to a peripheral portion 3 of this substrate portion 1 and the other edge side is connected to the movable mass portion 2 for supporting the movable mass portion 2. Furthermore, a movable electrode 6 which is formed on an upper surface of this movable mass portion 2, a thin-film portion 9 which is formed at an upper portion of this substrate portion 1 covering the cavity portion 5 and the movable mass portion 2, and a fixing electrode 10 which is formed on a surface opposing the movable electrode 6 of this thin-film portion 9 through a gap 8 are provided. |
