| 摘要 |
PURPOSE:To provide a small, low-costed light-excited tuning-fork vibrator type sensor which is easy to use. CONSTITUTION:A light-excited tuning-fork oscillator type sensor is provided with a tuning-fork sensor 17 and an oscillation exiciting semiconductor laser 12 which applies a laser beam to the tuning-fork oscillator 17 so as to excite the characteristic oscillation of the tuning-fork oscillator 17. A detecting semiconductor laser 13 which applies light beams to the tuning-fork oscillator 17 and which is equipped with a light detector 14 for detecting the characteristic frequency of the tuning-fork oscillator 17 from light outputs based on the interference of the reflected light beams with inner light is provided integrally with the oscillator 17 and the laser 12 on the same base board 11. |
