| 摘要 |
PROBLEM TO BE SOLVED: To perform excellent carrying in/out of a substrate even when an arm which transfers the substrate cannot be inserted to the gravity center of the substrate in a container which stores the substrate such as wafer. SOLUTION: A part of a substrate 2 is supported by inserting an arm means 6 to a first position P which does not reach the storing position 1a of a substrate container 1. Then, the arm means 6 which holds the part of the substrate 2 is taken out to a second position in the substrate container. Then, after re- holding the substrate 2 on the arm means 6 within a range which includes the gravity center, the substrate is carried out outside the substrate container 1. |
