| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily and certainly ensure electrical connection between a small- pitch electrode such as a semiconductor element and an electrode such as a circuit substrate by comprising a plurality of conductive parts disposed by sandwiching an insulation therebetween by containing a conductive particle in a polymeric substance consisting of a radiation sensitive resin material. SOLUTION: A plurality of columnar conductive parts 30 for electrically connecting one face to the other face are disposed with a given pitch, insulation parts 35 are formed among these conductive parts 30 to insulate each other, and a connector between a semiconductor element or the like and a circuit substrate or the like is provided. At this time, the conductive parts 30 contains a conductive particle in a polymeric substance consisting of a radiation sensitive resin material. The polymeric substance is preferably a conjugated dien-based radiation sensitive resin such as a circulated polybutadien-base or the like, for example. The conductive particle is preferably a carbon black of 1 to 1000 microns in particle size, nickel or the like, the content of which is about 4 to 50 wt.%. This connector can be easily formed by a photolithography technique.</p> |
