CERAMIC HEATER AND METHOD OF CONTROLLING TEMPERATURE OF THE CERAMIC HEATER

摘要

A method of controlling the temperature of a ceramic heater, comprising the steps of forming a resistance heating body by dividing the circuit thereof into two or more circuits on the outer and inner peripheral part sides of a substrate and, based on the results of measurement of temperatures by a temperature measuring means, inputting different powers to the circuits for temperature control, whereby the temperature on the outer peripheral part side is increased to a temperature equal to or higher than the temperature on the inner peripheral part side so as to uniform the temperature distribution on a substrate heating surface in radial direction in order to reduce a temperature difference on the heating surface of a silicone wafer.