Hybrid piezoelectric-magnetostrictive actuator

摘要

Hybrid actuator. The actuator includes a piezoelectric actuator spaced apart from a magnetostrictive actuator. A linkage is in contact with the piezoelectric and magnetostrictive actuator, the linkage having an end including microgrooves. A rotatable shaft includes microgrooves mating with the microgrooves in the linkage end. Electronic circuitry is provided to drive the piezoelectric actuator and the magnetostrictive actuator resulting in the piezoelectric and the magnetostrictive actuators moving 180° out of phase thereby moving the linkage to rotate the shaft. It is preferred that the actuators be driven at resonance. In one embodiment, the actuator includes three actuators to provide motion about three axes. In another embodiment the actuator is a linear actuator.