发明名称 |
Electrostatic chuck heater |
摘要 |
An electrostatic chuck heater including a base which is formed by: applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode; calcining the alumina sintered body; arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode; and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set not more.
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申请公布号 |
US2008047952(A1) |
申请公布日期 |
2008.02.28 |
申请号 |
US20070879740 |
申请日期 |
2007.07.18 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
MORI YUTAKA;HATTORI AKIYOSHI;TORIGOE TAKERU |
分类号 |
H05B3/06;B23B31/02;H05B3/03 |
主分类号 |
H05B3/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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