发明名称 |
TCCT MATCH CIRCUIT FOR PLASMA ETCH CHAMBERS |
摘要 |
A match circuit includes the following: a power input circuit coupled to an RF source; an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit; an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection to ground; an outer coil input circuit coupled between the first node and an input terminal of an outer coil; and an outer coil output circuit coupled between an output terminal of the outer coil and ground. |
申请公布号 |
US2015235810(A1) |
申请公布日期 |
2015.08.20 |
申请号 |
US201514698589 |
申请日期 |
2015.04.28 |
申请人 |
Lam Research Corporation |
发明人 |
Long Maolin;Marsh Ricky;Paterson Alex |
分类号 |
H01J37/32;H01J37/20 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
|
主权项 |
1. A match circuit for a plasma chamber, the match circuit comprising:
a power input circuit; an inner coil input circuit coupled between the power input circuit and an input terminal of an inner coil, the inner coil input circuit including an inductor and a capacitor coupled in series to the inductor, the inductor connecting to the power input circuit, and the capacitor connecting to the input terminal of the inner coil, a first node being defined between the power input circuit and the inner coil input circuit; an inner coil output circuit coupled between an output terminal of the inner coil and ground, the inner coil output circuit defining a direct pass-through connection that does not include an inductor or capacitor and is a direct connection to ground; an outer coil input circuit coupled between the first node and an input terminal of an outer coil; an outer coil output circuit coupled between an output terminal of the outer coil and ground. |
地址 |
Fremont CA US |