| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method for preventing interference with objects to be inspected by automatically setting measuring procedures of the objects to be inspected. SOLUTION: The shape measuring method comprises first steps (S101-S103) for projecting preliminary projection light brighter than projection light to an object to be inspected through the use of a pattern projection part, imaging the object to be inspected to which the preliminary projection light is projected through the use of the imaging part, and preliminarily measuring the three-dimensional shape of the object to be inspected on the basis of images of the object to be inspected to which the preliminary projection light is projected; a second step (S104) for setting measurement procedures to the object to be inspected on the basis of the three-dimensional shape of the object to be inspected preliminarily measured in the first steps; and a third step (S105) for actually measuring the three-dimensional shape of the object to be inspected on the basis of the measurement procedures set in the second step. COPYRIGHT: (C)2009,JPO&INPIT
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