发明名称 METHOD FOR ADHERING TRANSPARENT ARTICLES AND QUARTZ GLASS PLATE PREPARED THROUGH ADHESION AND DEVICE USING THE SAME
摘要 As an adhering method capable of simply and easily adhering materials transparent to short-wavelength ultraviolet light, particularly quartz glass plates, with each other at room temperature and ensuring transmission of light to a short-wavelength limit inherent in quartz glass or the like, an alkoxide is used as the adhesive material and by irradiating ultraviolet light on the adhering portion, two materials are adhered. By adhering quartz glass plates in the lateral direction, a larger-area quartz glass plate can be produced. The larger-area quartz glass plate can be used as a window for separating the light source part and the cleaning chamber of a photo-cleaning apparatus. <IMAGE>
申请公布号 EP1460047(A1) 申请公布日期 2004.09.22
申请号 EP20020792052 申请日期 2002.12.27
申请人 ONUKI, HIDEO 发明人 ONUKI, HIDEO
分类号 G02B1/04;B08B7/00;C03C27/10;G02B1/10;H01L21/304;(IPC1-7):C03C27/10 主分类号 G02B1/04
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