| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage system which suppresses temperature rising and decline in an energy loss and accuracy. SOLUTION: The stage system includes a movable stage 4; a linear motor 50 to move and drive the movable stage in a predetermined direction; a temperature sensor 7 to detect a temperature of a predetermined portion of the linear motor; a cooler 9 to cool a coil for generating a magnetic field of the linear motor; a drive control unit 33 to control drive of the linear motor based on input information to move and drive the movable stage; and a temperature control unit 34 which predicts temperature rising of the linear motor produced by drive of the linear motor based on the input information and on temperature information detected by the temperature sensor, and controls the cooler based on a predicted value of the temperature rising. COPYRIGHT: (C)2008,JPO&INPIT
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