| 摘要 |
PROBLEM TO BE SOLVED: To provide a replica mold having excellent performance of transferring the pattern of the master mold and also combining excellent hardness, transparency and heat and chemical resistances and a convenient and inexpensive method of manufacturing the replica mold. SOLUTION: The method of molding the replica mold has a first process of applying, to a substrate, a material for the replica mold containing a polysilane and a silicone compound, a second process of pressing a master mold having a specified fine pattern toward the applied material for the replica mold, a third process of irradiating the resultant body with energy rays from the substrate side, with the master mold and the material for the replica mold kept in a pressed state, a fourth process of releasing the master mold and a fifth process of irradiating the material for the replica mold with energy rays from the side where the master mold is pressed. COPYRIGHT: (C)2008,JPO&INPIT |
