| 发明名称 |
SEMICONDUCTOR DEVICE |
| 摘要 |
Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. |
| 申请公布号 |
US2016260653(A1) |
申请公布日期 |
2016.09.08 |
| 申请号 |
US201514872868 |
申请日期 |
2015.10.01 |
| 申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
JUN Chi Hoon;NA Jeho;JUNG Dong Yun;KO Sang Choon;NAM Eun Soo;LEE Hyung Seok |
| 分类号 |
H01L23/467 |
主分类号 |
H01L23/467 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor device comprising:
a substrate comprising a cantilever configured to generate a flow of cooling media through dynamic movement; an active area on the substrate which an electronic device is provided on; an insulation layer disposed to be spaced apart from the active area on the substrate; a lower electrode on the insulation layer; a piezoelectric film on the lower electrode; and an upper electrode on the piezoelectric film. |
| 地址 |
Daejeon KR |
