METHOD OF MANUFACTURING PRESSURE SENSOR AND PRESSURE SENSOR

摘要

A method of manufacturing a pressure sensor including a tubular housing having a lid-shaped support plate formed at one end of the housing, a diaphragm, a piezoelectric element for outputting an electrical signal corresponding to pressure received by the diaphragm, and a rod-shaped transmission section for transmitting the pressure to the piezoelectric element. The method includes the steps of accommodating the piezoelectric element into the housing, and fixing the transmission section to the housing through the diaphragm in a state in which a predetermined preload is applied to the piezoelectric element in an axial direction of the housing by pressing the piezoelectric element against the support plate by the transmission section.

主权项

1. A method of manufacturing a pressure sensor which comprises:
a tubular housing including a support plate formed on a one-end side of the housing to have a lid-like shape; a diaphragm provided on an other-end side of the housing; a piezoelectric element which outputs an electrical signal corresponding to pressure received by the diaphragm; and a rod-shaped transmission section which transmits the pressure to the piezoelectric element, the method comprising: accommodating the piezoelectric element into the housing; and fixing the transmission section to the housing through the diaphragm in a state in which a predetermined preload is applied to the piezoelectric element in an axial direction of the housing by the piezoelectric element being pressed against the support plate by the transmission section.