| 摘要 |
PROBLEM TO BE SOLVED: To provide detection of an error source such as contact abnormality using a simple method that does not require a specific circuit for contact check. SOLUTION: In a circuit element measuring apparatus including a signal generating unit 10 that applies voltage to an element DUT to be measured, a current detection unit 20 that detects current flowing through the element DUT to be measured, a voltage detection unit 30 that measures the voltage between the both terminal of the element DUT to be measured and a control unit 50 that calculates a predetermined element constant from the detected current and voltage, the control unit 50 including a voltage determining unit 31 that outputs a voltage abnormality signal when the detected voltage of the voltage detection unit 30 is at a predetermined threshold value or less, and a current determining unit 21 that outputs a current abnormality signal when the detected current of the current detection unit 20 is at a predetermined threshold value or less, determines the quality of the contact condition of a source terminal Hc, at the Hi side of the signal generating unit 10 side, or a sense terminal Hp, at the Hi side of the voltage detection unit 30 side, to the element DUT to be measured and the quality of the element DUT to be measured itself. COPYRIGHT: (C)2009,JPO&INPIT
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