发明名称 METHOD OF ALIGNING A TOOL
摘要 The present invention relates to a method for aligning a tool, capable of preventing abrasion caused by friction of a pin and a hole even if the pin of a tool is not accurately aligned with the hole of a stage. The method for aligning a tool includes: a step of horizontally moving the tool along an X-axis and a Y-axis in order for the pin of the tool gripping an object to be located on the upper part of the hole formed on the stage; a step of firstly dropping the tool along a Z-axis in order for the pin to be adjacent to the hole; a step of turning off an X-axis servo motor of the tool and a Y-axis servo motor in order for the tool to freely move along the X-axis and the Y-axis; a step of secondarily dropping the tool along the Z-axis in order for the pin to be inserted into the hole; and a step of turning on the X-axis servo motor of the tool and the Y-axis servo motor.
申请公布号 KR20160074099(A) 申请公布日期 2016.06.28
申请号 KR20140182917 申请日期 2014.12.18
申请人 SEMES CO., LTD. 发明人 HAN, KWANG HUN
分类号 H01L21/677 主分类号 H01L21/677
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