| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element, a force detection device and a robot having excellent detection accuracy.SOLUTION: The sensor element of the present invention includes a first piezoelectric plate, a second piezoelectric plate layered in a thickness direction of the first piezoelectric plate on the first piezoelectric plate, and a first joint layer laminating the first piezoelectric plate and the second piezoelectric plate, in which an end of the first joint layer has a portion overlapping neither an end of the first piezoelectric plate nor an end of the second piezoelectric plate when viewed in the thickness direction. The sensor element has a side electrode disposed on a side face parallel to the thickness direction, in which the end of the first joint layer is spaced from the side electrode.SELECTED DRAWING: Figure 4 |
