发明名称 POLLING DEVICE AND POLLING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a polling method and a polling device for manufacturing a porous dielectric body having desired piezoelectric characteristics.SOLUTION: After output of a charge amplifier 8 is made zero, voltage is applied to a sample, and corona discharge is stopped when electric displacement reaches a target value. As a corresponding measure when the electric displacement does not reach the target value, the maximum polling voltage is set and polling is stopped even when the polling voltage reaches a set value. After stopping the polling, the front and rear of the sample are short-circuited. When polarization is formed by corona polling, the electric displacement exhibits a residual value.SELECTED DRAWING: Figure 2
申请公布号 JP2016219687(A) 申请公布日期 2016.12.22
申请号 JP20150105290 申请日期 2015.05.25
申请人 KOBAYASI INST OF PHYSICAL RESEARCH 发明人 KODAMA HIDEKAZU
分类号 H01L41/253;H01G7/02;H01G13/00 主分类号 H01L41/253
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