| 发明名称 |
Hollow cylinder with reduced heat radiation for holding a substrate |
| 摘要 |
The hollow cylinder (1) for holding a substrate is provided with at least one means (4) which reduces heat radiation outwards from the cylinder wall (3).
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| 申请公布号 |
DE19829281(C1) |
申请公布日期 |
1999.10.07 |
| 申请号 |
DE19981029281 |
申请日期 |
1998.06.30 |
| 申请人 |
SIEMENS AG |
发明人 |
BRUCHHAUS, RAINER;SCHREITER, MATTHIAS |
| 分类号 |
C23C14/50;C23C16/458;H01L21/00;(IPC1-7):C23C14/50;C23C16/46;H01J37/32 |
主分类号 |
C23C14/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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