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发明名称
DEPOSITION APPARATUS
摘要
申请公布号
KR200183544(Y1)
申请公布日期
2000.06.01
申请号
KR19970036678U
申请日期
1997.12.11
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, DONG-SUN
分类号
H01L21/203;(IPC1-7):H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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