| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device for a substrate with a photosensitive layer which can complete exposure in a short period of time. <P>SOLUTION: The exposure device 1 has an external box 13a, in which an internal box 3b is provided. The internal box 3b is provided with shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, and a light shield plate 17. A film which absorbs ultraviolet rays is provided to surfaces of the shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, the internal box 3b, and the light shield plate 17, and when the shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, the internal box 3b, and the light shield plate 17 are irradiated with ultraviolet rays emitted by a lamp 9a, the majority is absorbed by the film. <P>COPYRIGHT: (C)2007,JPO&INPIT |
