发明名称 THIN-FILM TRANSISTOR PROVIDED WITH THREE-DIMENSIONAL CHANNEL STRUCTURE AND ITS MANUFACTURE
摘要 <p>PURPOSE: To provide a thin-film transistor with a three-dimensional multi-channel structure for improving the channel conductance and the current-driving capacity of a polycrystalline silicon thin film transistor. CONSTITUTION: A semiconductor layer 44 in a state of ohmic contact with a source electrode and a drain electrode 45 is formed between the electrodes. The semiconductor layer is constituted of a number of sub semiconductor layers comprising a number of silicon strips. In a number of sub semiconductor layers, each gate insulation film surrounds a front surface. Further, a gate 41 surrounds the outside of the gate insulation film, so that the entire surface layer of each sub semiconductor layer surrounded by the gate electrode is provided at a channel region 43.</p>
申请公布号 JPH0685256(A) 申请公布日期 1994.03.25
申请号 JP19930027830 申请日期 1993.02.17
申请人 SAMSUNG ELECTRON CO LTD 发明人 KAN MASAHITO;KIN TETSUMORI;KIN GENKON
分类号 H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L29/784 主分类号 H01L29/78
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