| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic member which has excellent thermal conductivity, and is hardly broken and excellent in long term reliability. <P>SOLUTION: The ceramic member 2 is formed of a plurality of base materials 11A and 11B made of a ceramic/metal composite 18, obtained by impregnating the open pores of a silicon-containing ceramic porous body 17 with metallic silicon 24. The base materials 11A and 11B are joined together through a joining layer 14 formed of the metallic silicon 24. The metallic silicon impregnated in the porous body 17 and the metallic silicon constituting the joining layer 14 exist in a boundary-free, continuous state. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
