发明名称 METHODS FOR TRANSITIONING A FLUID MENISCUS TO AND FROM SURFACES OF A SUBSTRATE
摘要 Methods for processing a substrate with a fluid meniscus are provided. One method includes positioning a transition surface substantially coplanar to a substrate surface. The transition surface is defined to be adjacent to an edge of the substrate. And, moving a fluid meniscus between the transition surface and the substrate surface.
申请公布号 US2009151753(A1) 申请公布日期 2009.06.18
申请号 US20090372683 申请日期 2009.02.17
申请人 LAM RESEARCH CORP. 发明人 WOODS CARL
分类号 B08B3/00;C25D5/22;C25D7/12;F26B5/04;H01L21/00 主分类号 B08B3/00
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