发明名称 |
A transform optical processing system. |
摘要 |
<p>A Fourier transform optical processing method and system suitable for production line checking in which an electrical signal is generated by generator (2) in response to a first image and a beam (5) of coherent light is modulated by modulator (6) controlled by the electrical signal; a Fourier transform image (7) of the modulated coherent light beam is formed, and then detected by detector (8). The detector (8) provides a second electrical signal representative of the Fourier transformed image. Other aspects of the invention include comparing the second electrical signal to a reference electrical signal for producing an output signal representing any differences; optically preprocessing the image; detecting the Fourier transform image and generating signals representative of its Fourier transform characteristics; and modulating a coherent light beam using a liquid crystal or other spatial light modulating device.</p> |
申请公布号 |
EP0265194(A2) |
申请公布日期 |
1988.04.27 |
申请号 |
EP19870309190 |
申请日期 |
1987.10.19 |
申请人 |
GLOBAL HOLONETICS CORPORATION |
发明人 |
CASASENT, DAVID PAUL;FRANKE, MARC ANTHONY;HEKKER, ROELAND MICHAEL THEODORUS;LIVNY, IZHAK MOSHE;MERCURIO, GREGORY SCOTT |
分类号 |
G01N21/88;H01L21/66;G01B11/24;G01B11/25;G01N21/93;G02B27/46;G02F1/01;G06E3/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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